The results showed that the samples were processed in the sputtering power 8w, pressure 4.7pa argon flow 30sccm, cleaning time under the conditions of 48min, the sample surface clean and free of damage, the luminous intensity and cleaning compared to 61.34% .

Results indicated that the samples are processed in sputtering power, pressure is 8 to 4.7 W Pa, argon gas flow of 30 SCCM, cleaning time for the 48 min under the conditions, the sample surface is clean, and free of damage with their luminous intensity before cleaning the 61.34 % increase in compari

The result indicated that, the sample is processed in the sputtering power is 8W, the intensity of pressure is 4.7Pa, the argon current capacity is 30sccm, the clean time is under the 48min condition, the sample surface does not have the damage cleanly, before its luminous intensity and the clean co

Results show that the sample is processed in sputtering power 8W, pressure 4.7Pa, argon gas volume is 30sccm, the cleaning time is under 48min conditions, surface clean and no injuries, 61.34% increase in its intensity as compared with before cleaning.

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