. SiCl4, h2, hcl do and industrial silicon raw materials, high temperature and high pressure fluidized bed (fluidized bed) generated sihcl3, will further disproportionation hydrogenation reaction to generate sihcl3 sih2cl2, and then generate a silane gas. Obtained silane gas into the plus continuous

. The method to SiCl H 2 , 4 , and industrial silicon HCl for raw materials, high temperature and pressure fluidized bed (boiling bed) to generate SiHCl SiHCl 3 3, will be further divided into 2 hydrogenation reactions that produce SiH Cl 2, then generates silane gas. The silane gas links into a sma

.This method take SiCl4, H2, HCl and the industry silicon as a raw material, (ebullition bed) produces SiHCl3 in the high temperature high pressure fluid bed, produces again the SiHCl3 further disproportionation hydrogenation SiH2Cl2, subsequently produces the silicon hydride gas.The system results

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